摘要 |
PURPOSE:To attain mechanical strength, to improve the characteristic of a piezoelectric vibrator and to attain ease of miniaturization by providing a lead- out part to a side face of an attenuation section at the middle part between the attenuation section end and the end of a vibrating section. CONSTITUTION:An HT-cut crystal vibrator 10 has a nearly several tens of micrones of thickness and made by the processing by the photolithography. Hatched parts in figure show an electrode, which is divided roughly into the vibrator part 11 and the frame part 15, and the vibrator part 11 is formed incorporatedly with a vibrator part 12 being an exciting electrode part shown as a rectangle nearly at the center and the attenuation part 13 provided to confine the vibrating energy to the vibrator part 12 by energy confinement. The vibrator part 11 is supported not by the end of the attenuation part 13 but by the center between the end of the attenuator 13 and the vibrator part 12 and a lead part 14 is provided from the end of the attenuator part 13.
|