发明名称 X-ray mask ring and apparatus for making same
摘要 The present invention is directed to a new and improved X-ray mask ring assembly and apparatus for making same which includes a mask ring, a plurality of kinematic mounts for removably mounting the mask on an alignment cartridge, each of the kinematic mounts including an insert member having a funnel-like shaped seat for receiving a mating ball-like shaped member mounted on the alignment cartridge, and an adhesive for mounting the insert member on the mask ring. An apparatus for making the mask ring assembly includes a fixture having an upper portion and a lower portion, which are adapted to be coupled together in close alignment one with respect to the other, a ball-like shaped member fixedly mounted on the lower portion, a mask ring having an opening for receiving an insert and said insert having a funnel-like shaped seat, the mask ring being mounted in the fixture so that the ball-like shaped member engages the seat, said mask ring being aligned with the fixture and held with respect thereto, and adhesive being applied to fixedly attach the insert member to the mask ring in its aligned position with respect thereto.
申请公布号 US4610020(A) 申请公布日期 1986.09.02
申请号 US19840568778 申请日期 1984.01.06
申请人 THE PERKIN-ELMER CORPORATION 发明人 LA FIANDRA, CARLO
分类号 G03F7/20;B23Q3/08;B23Q16/08;G03F1/14;H01L21/027;(IPC1-7):G21K5/00 主分类号 G03F7/20
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