| 摘要 |
A rugged Fabry-Perot interferometer comprises a solid etalon (15) made of single-crystal silicon with precisely parallel stacks (13) and (14) of dielectric materials coated on opposite sides thereof. The stacks (13) and (14) are identical to each other, and each stack comprises a plurality of layers of different materials having alternately high and low indices of refraction. A dielectric ring (30) made of the same material as the etalon (15) is bonded to a peripheral portion of one side of the etalon (15) by an epoxy material having the same coefficient of thermal expansion as the ring (30) and the etalon (15). The ring (30) with the etalon (15) bonded thereto is kinematically mounted on Teflon contact members (34) within an annular receiving structure (31) made of a metal (such as copper) of high thermal conductivity. Teflon contact members (39) on spring members (37), which are secured to the receiving structure (31), bear compressively against a peripheral portion of the other side of the etalon (15) to secure the etalon (15) within the receiving structure (31). Thermal equilibrium between the etalon (15) and the receiving structure (31) is provided by copper braids (40).
|
