| 摘要 |
PURPOSE:To treat uniformly and stably the inner surface of a plastic tube with plasma by lengthening a discharge path, by winding a plastic tube around a cylindrical electrode on an earth side through an insulating layer, providing an electrode, to which voltage is applied, on the outer periphery of the tube and conducting electrical discharge while moving any one of the electrodes. CONSTITUTION:A plastic tube 1 is wound around a cylindrical earth electrode 4 through an insulating layer 5 and a hollow truncated conical electrode 6, to which voltage is applied, is provided on the outer periphery thereof. One end of the plastic tube 1 is connected to an evacuation box 2 on the larger- diameter side of the electrode 6, and the other end is connected to a gas supply box 3. While a low-pressure gas is allowed to flow within the plastic tube, high-frequency electromagnetic waves from a power source 7 are oscillated between the electrodes. Glow discharge treatment is conducted while moving any one of said electrodes. A part 8 may be any of hollow part, an insulator and an electrical conductor and may have a built-in device for cooling the electrode 4 and the insulating layer 5. |
