| 摘要 |
PURPOSE:To enable high speed stable positioning to be performed by a structure even when it is used for a long time, by mounting a linear guide bearing member to a Y-table through a reinforcing member consisting of material having strength almost equal to that of an iron material. CONSTITUTION:A structure, forming mounting stepped parts 22, 23 extending in a direction Y in the upper surface of a base bed 21, here mounts reinforcing members 24, 25. A Y-table 28, forming in its bottom surface a pair of stepped parts extending in the direction Y, here mounts reinforcing members 29, 30. While the upper surface of the Y-table 28 forms a pair of mounting stepped parts 33, 34 by a protrusive part 32 extending in a direction X. The structure, mounting linear guide bearing member 41, 42 between the reinforcing members 24, 29 and between the reinforcing members 25, 30, movably mounts the Y-table 28 in the direction Y for the base bed 21. An X-table 51 is movable in the direction X for the Y-table 28. |
