| 摘要 |
PURPOSE:To enable inspection of the shape of an object to be inspected in a short time and accurately, by arranging a transfer means, a first means of patterning the object being inspected, a reference coordinates computing means, a transfer control means, a second patterning means for the object being inspected, a comparison means and like. CONSTITUTION:A camera 12, an X axis motor 14, a Y axis motor 16 and the like are provided. Then, when an object 10 to be inspected is set on a table, a CPU 36 outputs a signal to the motors 14 and 16 corresponding to a specified movement through a driver 28 to move the table so that the object 10 being inspected at a specified point in a photographing area of the camera 12. Then, the CPU 36 prepares a histogram of brightness distribution in a first window located at the center of a CRT 24 et in an image memory 20 to determine the binary coding threshold. The bright top surface of the object 10 being inspected is separated from the other dark part thereof based on the threshold to generate a 2-D pattern of the object being inspected and then, the coordinates of the center thereof are determined. Then, the center coordinates of the pattern is used to determine the center coordinates of the first window. Subsequently, the CPU 36 outputs a signal to the motors 14 and 16 to move the table so that the center coordinates may be positioned the center coordinates of the first window. |
