| 摘要 |
PURPOSE:To raise the photosensitivity, by providing a plane lens for condensation on a photodetecting element. CONSTITUTION:The plane lens 6 for condensation has a suitable refractive index distribution that the refractive index has a higher central part than the peripheral part. If the lens 6 is formed by a silicon oxide film, by employing an ion beam, nitrogen is injected to the silicon oxide film so as to have the distribution of the refractive index (n) in the figure. Thus, the incident light between the positions 11 and 12 at the position of the radius r0 from the center 0 of the lens 6 can be entirely condensed to a photodiode 1.
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