| 摘要 |
PURPOSE:To improve the reproducibility of characteristics by conducting the recovery of crystallizability and a change into a superconductor under specific conditions in an oxygen gas current regarding an oxide superconductor polycrystalline thin-film having a specific composition deposited onto a substrate through a sputtering method. CONSTITUTION:A polycrystalline thin-film consisting of BaPb1-xBixO3 (where 0.05<=x<=0.35) deposited onto a substrate through a sputtering method is kept for 2 or 4hr at a temperature of 430-530 deg.C in an oxygen gas current, and kept for 4 or 12hr at a temperature within a range of 580-650 deg.C. The thin-film composed of BaPb1-xBixO3 is acquired by using and sputtering a target obtained in such a manner that BaCO3, PbO2 and Bi2O3 are mixed so as to form a predetermined composition, heated for two 2hr at 800 deg.C in an oxygen atmosphere, molded through press molding, etc. and sintered for 8hr at 880 deg.C. Accordingly, the dispersion of compositions and characteristics can be solved, and a superconductor thin-film having excellent reproducibility and uniform characteristics can be acquired. |
