| 摘要 |
PURPOSE:To enable every spot light to focus on the surface position of a sample and make any change in the setting of the sections of the device unnecessary by providing a transparent dummy plate having the optical path-length equivalent to the difference of specification in a sample to the holder supporting a transparent, boardlike sample. CONSTITUTION:An illuminating light converged with a focusing lens 24 is applied from the backside of the reticle 10 placed on the holder 11A and refracted to be focused on the pattern position of the surface of the reticle 10. On the other hand, for example, in the case where a thin reticle 10A is exampled, a holder 11B is used instead of 11A and the reticle 10A is loaded on a thin dummy board 13A, on the virtue of which the total thickness of the reticle 10A and the dummy board 13A becomes the same as in the case of the reticle 10 only, resulting in focusing of the same illuminating system exactly on the surface position of the reticle 10 and allowing a high precision pattern examination in the same manner as in the reticle 10. |
