| 摘要 |
PURPOSE:To attempt to accomplish the simultaneous printing of a tip pattern and a mask name for mask indexing by providing two optical systems on an identical stage to allow the reduced projection of the tip pattern and the mask name. CONSTITUTION:A pattern image of a reticle 3 is reduced in size using a reduction lens 5 and exposed on a mask blanks 6. A length measuring system, a stage driving system 8 and a shutter system 4 control exposure time, stage feeding pitch and positioning, and the mask blanks 6 on which a desired mask pattern matrix is depicted is moved on the stage 9 with the system 8, being loaded on the XY stage, to the position just below the mask name exposing optical system L2 to successively reduce, project and print the ID indicating mask name at a prescribed position. |
