| 摘要 |
PURPOSE:To produce an ion source electrode which exhibits only a little thermal deformation despite having a large area by using independent electrodes each of which is divided into several blocks. CONSTITUTION:An accelerating electrode 5 for accelerating ions, a decelerating electrode 6 and an earthing electrode 7 are fixed to an electrode-supporting metallic part 7 while being separated from each other by means of insulating spacers 8 made of ceramics or similar material. Each of these electrodes are also divided in the direction perpendicular to accelerated ions into several blocks and the divided blocks constitute the accelerating, the decelerating and the earthing electrodes 5-7 which constitute an ion source electrode. Due to the above structure, the thermal deformation of each block of the ion source electrode is minimal. furthermore, as it is possible to remove only an intended block without decomposing the whole electrode during maintenance, the time for maintenance can be reduced.
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