发明名称 FILM FORMING DEVICE FOR SMALL PARTS
摘要 PURPOSE:To make the simultaneous formation of uniform films on many small parts possible by putting the many small parts into a meshed rotary barrel and forming the films for rust prevention thereon by an ion plating method in the stage of forming the films for rust prevention having the uniform thickness on the surface of the many small parts. CONSTITUTION:The many small parts to be treated are put into the cylindrical barrel 12 which is formed by working fine wires consisting of a stainless steel into a meshed shape in a vacuum vessel 21 and the barrel is rotated around a shaft 13 in the stage of forming the Ni films for rust prevention by the ion plating method on the surface of the small parts such as imaging hammers made of iron or steel. The inside of the vessel 21 is evacuated to a high vacuum and a crucible 17 contg. Ni 16 is heated to evaporate by an electron beam to ionize the Ni particles by an ionizing electrode 20. The ions are plunged into the barrel 12 to form the Ni films on the surface of the small parts in the barrel. The thickness of the Ni is detected by a sensor 15 in the barrel and a power source 18 for irradiating the electron beam is controlled to adjust the thickness of the Ni film on the surface of the small parts to a specified and uniform thickness.
申请公布号 JPS61194177(A) 申请公布日期 1986.08.28
申请号 JP19850034946 申请日期 1985.02.22
申请人 FUJITSU LTD 发明人 NAGAI SHIGERU;KASUYA AKIRA;KATO ICHIJI
分类号 C23C14/50 主分类号 C23C14/50
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