| 摘要 |
PURPOSE:To enable a marking depth to be stably controlled in a wide range through use of a small number of component parts, by a construction wherein a variable attenuator for varying the transmittance to a laser beam and a variable-magnification beam expander for varying the diameter of the laser beam are provided in an optical path for marking. CONSTITUTION:A marking laser beam is emitted from a laser light source 1. The laser beam passes through the variable attenuator 2 and the variable- magnification beam expander 3, is scanned in X- and Y-directions by a scanner 4, passes through a scanner lens 5, and is reflected by a reflecting mirror 6 for scanning on a predetermined part of an object to be marked. By regulating the transmittance of the attenuator 2, the quantity of light of the laser beam projected on the object is controlled, whereby the marking depth is roughly adjusted in the range of several hundred micrometers. Further, by regulating the magnification of the beam expander 3, the marking depth is finely adjusted in the range of not larger than 1mum. Accordingly, the marking depth can be stably controlled in a wide range. |
