| 摘要 |
PURPOSE:To reduce the operating degree of a chessman despite a shift of a long distance and at a high speed by providing a control switch to a control unit to shift an X-Y table in a long distance and at a high speed. CONSTITUTION:A control switch 6 is provided to a control unit 5 via a switch control line 7. When an X-Y table 1 is shifted in a long distance and at a high speed, the switch 6 is turned on. Thus the table 1 can be shifted continuously without operating a chessman 9. Furthermore the table 1 is shifted in proportion to the operating degree of a pole system coordinate converter 9 like a conventional case when the switch 6 is turned off.
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