| 摘要 |
PURPOSE:To enable detection of defective tendency of a specimen, by indicating a defective part of the specimen by obtaining OR else between a 2-dimensional pattern and the standard 2-dimensional pattern of the specimen. CONSTITUTION:A specimen 2-dimensional pattern is generated by image- processing of an image pick-up signal from a camera 12 through a specimen pattern forming means. And a specimen 2-dimensional pattern 22 and the standard 2 dimensional pattern 24 previously stored in a memory b are made to be displayed on the CRT20 and, the OR ELSE is taken by comparing and checking both patterns per each image element and consequently, when judgment is given to the effect that a number of different image elements exceeds that of allowable image elements, than a shape of different part 26 of both patterns 22, 24 only is displayed on the CRT20 and it is displace as unacceptable at lower right on the CRT20. By this arrangement, a defective part of the specimen can easily be detected. |
