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发明名称
PROCESS AND DEVICE FOR INTERFEROMETRIC EVENNESS MEASUREMENT
摘要
申请公布号
EP0066030(B1)
申请公布日期
1986.08.27
申请号
EP19810710020
申请日期
1981.05.29
申请人
IBM DEUTSCHLAND GMBH;INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
JARISCH, WALTER, DR.;MAKOSCH, GUNTER;SCHMACKPFEFFER, ARNO, DR.
分类号
G01B11/24;G01B11/30;(IPC1-7):G01B11/30
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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