FORMATION OF DEPOSITED FILM

摘要

PURPOSE:To attain enlargement, improvement of productivity and mass production of the title films by a method wherein an active compound containing carbon and halogen as well as another active compound produced from a nitrogen contained filming compound are separately fed to a filming space to form said films by means of making them chemically react to each other. CONSTITUTION:An active compound A produced by decomposing carbon and halogen contained compound as well as another active compound B produced from a nitrogen contained filming compound chemically reacting to the former are separately fed to a filming space to form said films on a substrate by means of making them chemically react to each other. The life of applicable active compound A is recommended to exceed 10 seconds in terms of productivity and easy handling. A gaseous or easily gasified compound such as e.g. CF4 may be recommended for the carbon and halogen contained compound while a compound comprising nitrogen and one or exceeding two kinds of component atoms other than nitrogen may be recommended for the nitrogen contained compound. Finally the preferable weight ratio of active compounds A and B may be 8:2-4:6.