发明名称 Method of producing sheets of crystalline material.
摘要 A method of producing sheets of crystalline material, wherein a growth mask (32, 34) is formed upon a substrate (10) so as to expose selected areas of the substrate through the mask and crystalline material is grown at areas of the substrate (10) exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material (18). This sheet (18) is separated from the substrate so that the substrate can be reused. To assist separation and ensure the plane of separation does not wander, the substrate or mask are configured to weaken the bonding of the crystalline material thereto. For example, the substrate is scalloped and all but its peaks are covered with the mask, or the mask has a rough surface to ensure voids form between the mask and the crystalline sheet grown thereover.
申请公布号 EP0192280(A2) 申请公布日期 1986.08.27
申请号 EP19860102510 申请日期 1981.04.06
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 BOZLER, CARL O.;FAN, JOHN C.C.;MCCLELLAND, ROBERT W.
分类号 C30B19/00;C30B25/02;C30B25/04;C30B33/00;H01L21/20;H01L21/263;H01L21/84;H01L25/04;H01L31/04;H01L31/042;H01L31/0687;H01L31/18;H01S5/02 主分类号 C30B19/00
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