| 发明名称 |
Height measuring system |
| 摘要 |
The invention of this disclosure is a profiling and testing system that uses an air probe to determine the contour of a wafer containing a plurality of dies so that an electrical sensor may automatically step from die to die and test the completed dies in the wafer.
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| 申请公布号 |
US4607525(A) |
申请公布日期 |
1986.08.26 |
| 申请号 |
US19840659210 |
申请日期 |
1984.10.09 |
| 申请人 |
GENERAL SIGNAL CORPORATION |
发明人 |
TURNER, MICHAEL D.;ROCH, JACQUES |
| 分类号 |
G01B13/00;G01B13/06;G01B21/00;(IPC1-7):G01B13/16;G01R31/02 |
主分类号 |
G01B13/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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