| 摘要 |
PURPOSE:To obtain a durable detector with a simple construction which provides a higher detection sensitivity with a minimized power consumption, by arranging detection leads and heater leads on an overhung section so as to be covered separately with an electrically insulating material. CONSTITUTION:A bridge 3 comprising an electrically insulating material is mounted between pedestals 1b and 1b' formed at left and right corners of a substrate 1 and overhung into the air. Detection leads 5a and 5b are arranged on the bridge 3 with the ends thereof as opposed to each other separately at a specified distance. A gas detection layer 7 comprising a specified semiconductor material is formed in this space between the opposed ends to detect gas depending on changes in the resistance value thereof by the adsorption of gas. A heater lead 8c is provided on the bridge 3 in parallel with the leads 5a and 5b. The leads 5a and 5b and the lead 8c are covered completely with an electrically insulating material except for the gas detection area in such a manner as to be separated on the bridge 3 electrically therebetween completely. Thus, leakage current between the leads can be eliminated almost completely. |
