发明名称 PRODUCTION OF DISILANE
摘要 PURPOSE:To produce safely disilane in a high yield without requiring cooling to an extremely low temp. by reducing hexachlorodisilane with a metallic hydrogen compound in a specified boiling solvent. CONSTITUTION:A metallic hydrogen compound such as LiAlH4 is added to sufficiently dehydrated diethyl ether and/or diisopropyl ether as a solvent by an amount (weight) 1-10 times the amount of hexachlorodisilane to be added and the solvent is kept in a boiling state. Hexachlorodisilane is slowly added to the boiling solvent under ordinary or elevated pressure in 3-10hr, and disilane produced by reduction is introduced into a soubleor multi-tube type condenser, condensed, and collected in a vessel kept cold. Thus, disilane useful as a special gas for producing a silicon semiconductor can be produced in a high yield.
申请公布号 JPS61191512(A) 申请公布日期 1986.08.26
申请号 JP19850030233 申请日期 1985.02.20
申请人 TOAGOSEI CHEM IND CO LTD 发明人 HIRANO OSAMU;ISHIKAWA NOBUHIRO;HARADA MASAYOSHI;HATTORI TATSUHIKO
分类号 C01B33/04 主分类号 C01B33/04
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