摘要 |
PURPOSE:To produce safely disilane in a high yield without requiring cooling to an extremely low temp. by reducing hexachlorodisilane with a metallic hydrogen compound in a specified boiling solvent. CONSTITUTION:A metallic hydrogen compound such as LiAlH4 is added to sufficiently dehydrated diethyl ether and/or diisopropyl ether as a solvent by an amount (weight) 1-10 times the amount of hexachlorodisilane to be added and the solvent is kept in a boiling state. Hexachlorodisilane is slowly added to the boiling solvent under ordinary or elevated pressure in 3-10hr, and disilane produced by reduction is introduced into a soubleor multi-tube type condenser, condensed, and collected in a vessel kept cold. Thus, disilane useful as a special gas for producing a silicon semiconductor can be produced in a high yield.
|