摘要 |
PURPOSE:To obtain a thin film magnetic head which secures the stable and satisfactory electromagnetic conversion characteristics regardless of the form and production of a magnetic core, a protection film, etc., by forming upper and lower thin film magnetic matters so as to secure the positive/negative magnetic distortion characteristics opposite to each other between a center area and a terminal area within the same magnetic core surface. CONSTITUTION:A sputtering Al2O3 film is formed on a substrate 13 of Mn-Zn ferrite, etc. as a foundation film 12, and an Ni-Fe alloy is formed by a sputtering process as a lower magnetic core 1. For instance, the films having positive and negative magnetic distortion constants are formed at both center and end parts respectively. A magnetic gap 4 is formed with Al2O3 by a sputtering process. So is with an upper magnetic core 2. The patterning is carried out by an ion milling process with those cores 1 and 2, a coil conductor 3 and the gap 4 respectively. Then the terminal part is formed by a plating process and then a protecting film 5 of Al2O3 is formed by a sputtering process.
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