| 摘要 |
A method of holding an polishing a workpiece whereby a liquid such as water is applied between the workpiece and a support member and the liquid is frozen to secure the workpiece to the support member. A polishing member is positioned in contact with the workpiece in a grinding liquid and the polishing member and the workpiece are moved relative to each other to polish the workpiece. Grooves or through holes may be provided in a surface of the support member to hold the water or other suitable liquid. The liquid to be frozen further may be impregnated into a liquid absorbing material.
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