发明名称 FORMATION OF PATTERN
摘要 PURPOSE:To enable to easily judge the coincidence of the grooved strips for graduation of a graduated scale and those of the other graduated scale by a method wherein the grooved strip row for graduation of the graduated scale is formed in such a way as to superpose on the grooved strip row for graduation of the other graduated scale. CONSTITUTION:A graduated scale 11, which is formed in a mask 12 for processing, is formed in such a way that the width Wc of each grooved strip for graduation of a grooved strip row 10 for graduation constituting the graduated scale 11 becomes narrower than the width Wa of each grooved strip for graduation of a grooved strip row 6 for graduation constituting a graduated scale 7, which is formed in a substrate 1, and moreover, the grooved strip row 10 for graduation of the graduated scale 11 is superposed on the grooved strip row 6 of the graduated scale 7. By this way, which grooved strip for graduation of the graduated scale 7 and which grooved strip for graduation of the graduated scale 11 coincide with each other can be easily discriminated by a visual observation.
申请公布号 JPS61190940(A) 申请公布日期 1986.08.25
申请号 JP19850031256 申请日期 1985.02.19
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 KATO NAOKI;MAKIMURA TAKASHI
分类号 H01L21/027;G03F7/20;H01L21/30;H01L21/66 主分类号 H01L21/027
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