| 摘要 |
PURPOSE:To correct a dry plate's flatness by a method wherein a flat standard plate, which crosses at right angle to the dry plate formed with a light shielding film and a photo-resist, is disposed and interference fringes, which is created by reflection light obtained projecting monochroic color thereto, is monitored. CONSTITUTION:Printing to a pattern's dry plate 12 of a master mask 11 is performed contacting to the dry plate 12 with the mask 11. At this time, a flat standard plate 13 is disposed to position crossing at right angle to the dry plate 12. Laser beam 17 is projected to the dry plate 12 and the standard plate 13 through a beam-expander 6 and a half-mirror 14. Light 17b reflected from the surface of the dry plate 12 and the standard plate 13 creates interfer ence fringes interfering with mutually. An operator checks flatness of the dry plate 12 and arranges thereof by means of observing the interference fringes appeared on a screen 15. |
