| 摘要 |
PURPOSE:To make it feasible to perform unmanned operation during night time etc. while improving the throughput by a method wherein wafer labels comprise an exposure flag representing the printing results of wafer while transmitting the wafer labels simultaneously with the carriage of wafers. CONSTITUTION:A wafer label 1 is composed of a carrier No.2 representing the carrier to which a wafer belongs, a wafer No.3 representing the sequence of wafer, a job No.4 specifying the printing requirements for semiconductor printing part and an exposure flag 5 representing the printing results of wafer etc. belonging to each wafer. A RAM memorizes the sequence flag utilized for sequence control of each unit as well as the wafer label 1 belonging to each wafer to perform carriage, delivery of wafers as well as transfer of wafer labels between each unit. |
