发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To remove defects, in which a connecting section in a semiconductor element is cracked, strain is left in the semiconductor element and section except the connecting section are deteriorated, by previously preheating a projecting electrode before pressing and pressing the semiconductor element at a specific temperature. CONSTITUTION:A pressing section 1, a copper lead frame 4 and a semiconductor element 3 are held for 1sec at 200 deg.C as a temperature where an Au-Sn eutectic alloy is not melted, the pressing section 1 is pushed down, and the temperature of the pressing section 1 is held for 0.5sec at 300 deg.C as a temperature where the gold-tin alloy is melted completely by flowing currents through the pressing section, thus manufacturing the gold-tin alloy 7 by a tin plating 5 on the lead frame 4 and a gold projecting electrode 6 for the semiconductor element 3. The gold-tin alloy 7 completely solidifies as it is left as it is pressed by lowering the temperature of the pressing section of 1.5sec up to 200 deg.C, the semiconductor element 3 and the lead frame 4 are connected, and pressure is removed by lifting the pressing section and the semiconductor element is cooled up to the normal temperature.</p>
申请公布号 JPS61190954(A) 申请公布日期 1986.08.25
申请号 JP19850263373 申请日期 1985.11.22
申请人 NEC CORP 发明人 BONSHIHARA MANABU;ITO YOSHIO
分类号 H01L21/58;H01L21/60;H01L21/603;(IPC1-7):H01L21/60 主分类号 H01L21/58
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