摘要 |
PURPOSE:To reduce storage capacity, which is necessary to a table, and to enable production of the table simplify by a method wherein the table for recognizing circuit part is divided based on a mask-pattern's characteristic of an IC. CONSTITUTION:Code, which has bits of several layers of several layers, is established to whole region formed being divided by slides inside of each slit. Extraction of elements is performed referring to a table for recognizing elements, which has been produced previously, for recognizing the region being lapped. At that time, the table for recognizing elements is divided by two. One of them is a table formed by a mask (diffusion, polysilicon, Al and contact etc.) to be a wiring pattern. Another one is a table of an injected mask (for capacitor and well etc.). Thereby, storage capacity necessitated for the table is reduced, then the production of the table can be simplified. |