PARTS FOR DIES FOR IC PRODUCING EQUIPMENT

摘要

PURPOSE:To improve the wear resistance of parts for dies, to prevent the chipping during use and to produce stably IC by using a sintered high-speed tool steel. CONSTITUTION:Parts for dies for IC producing equipment such as a pot 3 and a plunger 5 are made of a sintered high-speed tool steel. This tool steel has high hardness of >=64 HRC and a structure contg. M6C and MC type carbides dispersed uniformly and finely in the matrix. The carbides have higher hardness and wear resistance than Cr carbide in a die steel, so the life of the dies for IC producing equipment can be prolonged.