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发明名称
COATING FOR RESIST
摘要
申请公布号
JPS61189691(A)
申请公布日期
1986.08.23
申请号
JP19850029297
申请日期
1985.02.19
申请人
ASAHI CHEM IND CO LTD
发明人
MIYABE SUSUMU;SATO TAKASHI
分类号
H05K3/06;B05D1/18;B05D7/00;H01L21/027;H01L21/30
主分类号
H05K3/06
代理机构
代理人
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