| 摘要 |
PURPOSE:To contrive to reduce the variation in angle of mirrors, etc. due to temperature changes by uniforming the temperature distribution of oscillator constituents, by a method wherein a cooling medium is passed through the pipe as the mount substrate and then through structures to be cooled such as mirror adjustment in respective parts. CONSTITUTION:The laser tube 5 is double-tubular for oil cooling and is provided with a folding mirror adjustment 6, a total reflection mirror adjustment 7, and a partial-transmission mirror adjustment 8 at both ends. The oil cooling medium coming out of an oil tank always passes through a main pipe 1, and the cooling medium equalized in temperature to the main pipe 1 is flowed to other structures to be cooled. This process uniforms the temperatures particularly of the main pipe 1 and the respective mirror mirror adjustments 6-8. |
