| 摘要 |
PURPOSE:To form an amorphous silicon nitride film having excellent wear resistance and adhesiveness by subjecting a mechanical high-speed sliding member to a surface treatment by the glow discharge of a gaseous mixture composed of a gas contg. an adequate ratio of Si and gas contg. N. CONSTITUTION:The mechanical high-speed sliding member such as revolving shaft or revolving bearing is subjected to the surface treatment with an amorphous SiN film by the glow discharge of the gaseous mixture composed, by flow rate ratio, of 1; gaseous SiH4 and >=6 gaseous N2. The above-mentioned SiN film is formed in the range where the ratio of the absorption intensity IA of the lattice oscillation of Si-H or SiH2 at 2,000-2,100cm<-1> by the measurement of IR absorption spectra and the absorption intensity IB of the lattice oscillation of Si-N at 800-1,000cm<-1> is 0<=IA/IB<=0.3 and the value of the optical band gap is 2.5-2.9eV. The surface treatment which provides excellent wear resistance, good adhesiveness and high strength to internal stress and impact to the above-mentioned member, is low in cost and is good in mass productivity is thus made possible.
|
