| 摘要 |
PURPOSE:To obtain an amorphous soft magnetic film which has a high saturated flux density, a low saturated magnetic distortion constant and wide range of composition with which above two characteristics are provided, by making Co, Zr and Pd contained with certain contents. CONSTITUTION:The composition of an amorphous soft magnetic film material is expressed by a formula CoxZryPdz, wherein 0.85<=x<=0.94, 0.04<=y<=0.07 and 0.01<=z<=0.10. The amorphous soft magnetic film is formed of an amorphous alloy material of Co-Zr-Pd system, which is obtained by adding Pd to an amor phous alloy of metal-metal system, Co-Zr. A chilled liquid method, a sputtering method or the like may be employed to produce the alloy, but when very thin film is required the sputtering method is preferred. With this method, the mate rial which is easy to be made amorphous and to be formed into a film of the thickness from several hundred Angstroms to several millimeters can be obtained and the amorphous soft magnetic film thus obtained shows good film adhesive ness. |
