| 摘要 |
PURPOSE:To manufacture a magnetic recording medium at a high speed and also stably by forming a permalloy film on a substrate by a vacuum vapor- depositing method, and forming a Co-Cr alloy on said film by a DC magnetron type high speed spattering method. CONSTITUTION:A substrate 2 consisting of a heat resisting high polymer material goes into an upper chamber 11 from an inlet 18 which is brought to differential exhaust, is held by a can 20 which has been heated to >=100 deg.C from a guide roller 19, permalloy is vapor-deposited from a permalloy vapor deposition source 22, in a part of a mask opening part 21, and the substrate passes through the guide roller 19 and goes into a differential exhaust chamber 13 being the next chamber. A lower chamber 12 of a vacuum vapor deposition chamber 10 is exhausted to the 10<-6>Torr level, and a film accumulating speed by the permalloy vapor deposition source 22 is about 4,000Angstrom /sec. Subsequently, the substrate 2 passes through the differential exhaust chamber 13 and enters into an upper chamber 15 of a spatter chamber 14, a Co-Cr alloy film is spattered by a Co-Cr target 25, and the substrate enters into the upper chamber 15 of the spatter chamber 14 again, passes through a guide roller 23, and goes out to the outside from an outlet which is brought to differential exhaust.
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