| 摘要 |
PURPOSE:To suppress the occurrence of the speckle, to improve the illumination efficiently and the through-put by guiding plural pulse fluxes from the laser to the different path by a shunt circuit means and superposing it to an irradiated surface by a converging system and executing the irradiation once. CONSTITUTION:The light flux of an excima-laser 1 is shaped by an aforcal converter 2, shunted by scanning mirrors 3 and 5, scanned in the two-dimentional manner on a fly eye lens surface 7 by an ftheta lens 6, the secondary light source is formed and an irradiated surface 9 is illuminated by the converging system 8. The beam made incident on the lens 7 is almost parallel, the light flux at every pulse from the laser 1 is guided at every element lens of the lens 7, goes to be a point light source at the outlet, for respective points on the irradiated surface 9, only one beam arrives by one irradiation, and therefore, the interference hardly occurs. Consequently, by using the high output laser, the occurrence of the speckle is suppressed on the irradiated surface, the illumination can be efficiently illuminated, and the through-put can be improved.
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