| 摘要 |
PURPOSE:To utilize different kind of ion beams simultaneously and effectively by employing plural chambers at mass spectrograph electromagnet section while providing passages for different kind of ion beams. CONSTITUTION:Ions produced from an ion source 1 are taken out as an ion beam through a take-out electrode 2 then required kind of ions are selected through a chamber 7a at mass spectrograph electromagnet section 3 than passed through a beam line 4a and converged through a slit 5a to be impinged against the entire face of target filled at the end station 6a. While unnecessary ion beam 9 will pass through a chamber 7b at the magnet section 3 then through a beam line 4b and reach to the end station 6b to be utilized effectively. Consequently, different kind of ion beams can be utilized effectively while the sidewall of chamber 7 can be protected from damage due to impingement of beam 9.
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