| 摘要 |
<p>PURPOSE:To enable active matrix driving of an active matrix type liquid crystal display device having a non-linear active element comprising metal/insulator/ metal constitution, by using Al as the metal and aluminium oxide as insulator. CONSTITUTION:Al film is formed on a plastic substrate 23 having a display electrode 21 such as ITO formed thereon, and a data line 17 is formed by photoetching. An oxide film 25 is formed by oxidizing the surface of the Al. The Al surface is exposed by etching a part of the oxidized film, and a thin layer oxidized film 27 is formed by oxidizing further the surface thermally. An Al thin film 29 is formed, and the display electrode 21 is connected with the data line 17. Thus, an active element comprising built up layer of Al- aluminium oxide and Al is formed, which is connected with the display electrode 21. By this constitution, a liquid crystal element capable of displaying active matrix display can be obtd. by a low temp. process.</p> |
