| 摘要 |
PURPOSE:To make it possible to measure accurately the temperature at the measuring point, by installing the temperature sensor at the top of the edge sensor jutting out into the central aperture. CONSTITUTION:The edge sensor of the probe card is composed of two pieces of pin material, one of which is mainly constituted of the main body of edge sensor 1 and the temperature sensor 3 which is fixed at the top of the main body of edge sensor by supporting body 2. The edge sensor 2 is arranged near the measuring probe 4. Two pieces of pin material are mutually short-circuited and become opened only when they are on the pad 5. The temperature sensor is installed at the top of either one of them. For the temperature sensor, the well-known thermocouple, such as the copper-constantan, chromel-constantan and platinum-rhodium, is selectively used, and according to the circumstances the temperature sensor of P-N junction semiconductor, for example, amorphous SiPn junction thermocouple and crystal thermometer are of course applicable. |
