发明名称 EQUIPMENT FOR ESTIMATING SEMICONDUCTOR DEVICE
摘要 PURPOSE:To measure and estimate various high frequency characteristics of high frequency transistors in the state of chip as they are, by forming the high frequency probe provided at the top with the fixed coaxial type contact terminal to which the flexible coaxial cable is connected. CONSTITUTION:The high frequency probe is provided with the following components; center conductor 102 made of copper, etc. coaxial insulation resin 103, outer conductor 104 made of copper, etc. external fixing conductor 105 made of copper, etc. flexible center conductor 106 formed by twisted copper wire, etc. flexible outer conductor 107 formed by twisted copper wire, etc. 50OMEGA fixed mini-cable part 108, 50OMEGA flexible mini-cable 109, horizontally supporting metal fitment 110, chip stand 111, and impedance transformer 102, etc. Measurement is done by connecting this high frequency probe in stead of the transistor to be tested and making the matched state or adjusting the reference plane, so that the high frequency characteristics in the chip state can be precisely estimated.
申请公布号 JPS61187244(A) 申请公布日期 1986.08.20
申请号 JP19850026968 申请日期 1985.02.14
申请人 MATSUSHITA ELECTRONICS CORP 发明人 TAKAHASHI JUNICHI;YAMASHITA YASUHISA;KONNO TOSHIMITSU
分类号 G01R31/26;G01R1/073;H01L21/66 主分类号 G01R31/26
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