| 摘要 |
PURPOSE:To measure coordinate values of numbers of points on a surface to be observed in short time by irradiating the object of observation with plural light beams at the same time and forming plural light spots. CONSTITUTION:A diffraction grating 7 is provided as a beam number converting means which converts a light beam projected by a light beam generation source 1 into plural light beams. Then, respective optical fibers which constitute the grating 7 operate as a cylindrical lens and when they are irradiated with the light beam, plural light beams are obtained by light interference to form plural light spots on the object of observation at the same time. Thus, real images AA, BB, CC - of the plural light spots are obtained on a linear sensor array 6 at the same time and read by the sensor array time at a time, thereby reading those X coordinate values almost at the same time. Therefore, three-dimensional coordinate values of numbers of points on the object are detected in a short time. |
