发明名称 |
Apparatus for measuring film thickness |
摘要 |
An elliptically polarized monochromatic light is obtained from monochromatic light select unit and is reflected at an interface between an objective film and substrate. An extinction wavelength of the reflected light, when the amount thereof detected at photodetector becomes zero, is detected at control unit and the true thickness of the film is calculated from the detected extinction wavelength.
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申请公布号 |
US4606641(A) |
申请公布日期 |
1986.08.19 |
申请号 |
US19840645924 |
申请日期 |
1984.08.30 |
申请人 |
NIPPON KOKAN KABUSHIKI KAISHA |
发明人 |
YAMADA, TAKEO;TAKASAKA, KOUSAKU |
分类号 |
G01B11/06;G01N21/21;(IPC1-7):G01B11/06 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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