发明名称 |
Textured carbon surfaces on copper by sputtering |
摘要 |
A very thin layer of highly textured carbon is applied to a copper surface by a triode sputtering process. A carbon target 10 and a copper substrate 12 are simultaneously exposed to an argon plasma 14 in a vacuum chamber. The resulting carbon surface is characterized by a dense, random array of needle-like spires or peaks which extend perpendicularly from the copper surface. The coated copper is especially useful for electrode plates in multistage depressed collectors.
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申请公布号 |
US4607193(A) |
申请公布日期 |
1986.08.19 |
申请号 |
US19840659475 |
申请日期 |
1984.10.10 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION |
发明人 |
CURREN, ARTHUR N.;JENSEN, KENNETH A.;ROMAN, ROBERT F. |
分类号 |
H01J23/02;H01J23/027;(IPC1-7):H01J23/02 |
主分类号 |
H01J23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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