发明名称 Method and apparatus for lapping and polishing optical surfaces
摘要 The invention is directed to a method and apparatus for lapping and polishing preferably larger aspheric mirrors such as for astronomical telescopes. The apparatus is in the form of a membrane covering the entire surface to be polished. On the rearward face of the membrane, a plurality of actuators are arranged close to one another and have pressure forces which are individually adjustable. The actuators are stationary relative to the workpiece or perform only small oscillatory movements when compared to the stroke of the lapping tool. With the aid of the actuators, a pressure distribution can be built up over the workpiece which permits different subareas of the workpiece to be removed in different intensities in a single working step.
申请公布号 US4606151(A) 申请公布日期 1986.08.19
申请号 US19840673864 申请日期 1984.11.21
申请人 CARL-ZEISS-STIFTUNG 发明人 HEYNACHER, ERICH
分类号 B24B13/00;B24B13/015;B24B21/08;G02B5/10;(IPC1-7):B24B13/00 主分类号 B24B13/00
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