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发明名称
摘要
申请公布号
JPS6136627(B2)
申请公布日期
1986.08.19
申请号
JP19800052779
申请日期
1980.04.21
申请人
RELIABILITY INC
发明人
BRADSHAW, JAMES I.
分类号
G01R31/26;G01R31/28;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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