| 摘要 |
PURPOSE:To measure an inter-electrode distance with good accuracy and to adjust adequately the inter-electrode distance in one-side electroplating by measuring the thickness of an electrode row and determining the inter-electrode distance from the value thereof. CONSTITUTION:The thickness of the electrode row is measured by a thickness measuring mechanism provided to a gripping means in the stage of gripping the electrode row by the gripping means. On the other hand, the distance (a) from an electrode support 2 to a pass line 5 is always measured. The inter- electrode distance (c) is determined from the distance (a) and the electrode thickness (b) measured in the above-mentioned manner. The distance (c) and a reference inter-electrode distance are compared and the controlled variable, i.e., the distance to raise the electrode support 2 is determined and the support 2 is so controlled as to raise the electrodes X by as much as the determined distance. The maintenance of the adequate inter-electrode distance is thus made possible at all times in one-side electroplating.
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