| 摘要 |
PURPOSE:To mass-produce simply phase variation type recording medium having superior characteristic, by covering substrate surface with Sn-Zn alloy film having a specified compsn. at manufacturing recording medium utilizing laser light. CONSTITUTION:A substrate 1 for recording medium composed of circular sheet made of glass or acrylic resin is revolved by a revolving shaft 2. Inside of reaction chamber is made to high vacuum state, a boat 3 for Sn, a boat 4 for Zn provided under a substrate 1 are heated respectively by electric heaters 5, 6 to vaporize Sn, Zn in the boats 3, 4, and Sn-Zn alloy film is formed on surface of the substrate 1. In this case, the temp.s of Sn, Zn in the boats 3, 4 are controlled by the heaters 5, 6, and the numbers of revolution of the substrate 1 is controlled. In addition thereto, by controlling opening and closing of a shutter plate 7 between both boats 3, 4 and the substrate 1, compsn. of Sn-Zn alloy film formed on the substrate 1 is adjusted to that composed of 45-60 atomic % Sn and the balance Zn. |
