| 摘要 |
PURPOSE:To improve an amount of disposition of objects for length measuring while shortening the length measuring time by a method in which the electron microscope images are temporally accumulated and simultaneously with measuring the first measuring point the visual field selection of the second measuring point is taken in advance for being disposed in parallel. CONSTITUTION:Electron rays inside a lens-barrel 1 are radiated on an object, which is fixed to a sample stand 4 of a sample chamber 3, while the generated secondary electrons are detected by a detector 5 and guided to image display 12 for being measured. Thereby, the image at the first measuring point is transferred to the image memory 11 through an image input device 9 for being temporally accumulated and while they are read out for being measured by the display 12, the transfer direction of the sample stand 4 to the second measuring point and its amount are calculated in order to transfer the sample stand 4 through a control device 7. Accordingly, when performing measurement at the plural measuring points, its arrangements can be disposed in parallel for apparently shortening a measuring time and improving throughput.
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