发明名称 PROCESSING METHOD FOR THIN FILM SOLAR CELL
摘要 PURPOSE:To expose the metallic electrode plane for leading out lead terminals on a large-area substrate and that to enable the series connection of split solar cells, by a method wherein fine abrasive grain particles are ejected to the surface of an amorphous Si/clear electrode layer. CONSTITUTION:In order to series-connect photovoltaic cells M, a photovoltaic layer 3 is removed by exposing a part (shown by oblique lines in Fig) M' of each cell M by the below-mentioned ejection, thus exposing the surface 2a of a metallic electrode layer 2. In other words, the photovoltaic layer 3 is removed by 2-sec ejection of 600-mesh particles of Si carbide, as fine abrasive grain particles, in nitrogen flows under a pressure of 2kg/cm<2> vertical to the amorphous Si surface of said layer 3. Next, electrical insulations 6 are formed by printing an electrically insulating resin in split grooves 5 by screen printing in order to prevent the short circuits among the split metallic electrode layers 2. Then, Ind oxide is deposited by electron beam evaporation as a clear electrode layer 4 by using the masking method so that split photovoltaic cells 3 can be connected in series, and a solar battery module of the series connection of four cells M is obtained.
申请公布号 JPS61183975(A) 申请公布日期 1986.08.16
申请号 JP19850023490 申请日期 1985.02.12
申请人 TEIJIN LTD 发明人 NAKATANI KENJI;OKANIWA HIROSHI
分类号 H01L31/04;H01L27/142;H01L31/0224 主分类号 H01L31/04
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