| 摘要 |
PURPOSE:To make ion plating of inner surface of pipe, etc., hitherto impossible, possible, by introducing discharge plasma beam into inner surface of pipe, etc., while combining magnet and coil, and ion plating inner wall. CONSTITUTION:Plasma generated at a plasma source 1 is introduced to inner surface of a pipe 7 being material to be ion plated and ion collector, by a magnetic force line 8 formed by combination of an annular magnet 2 and an air-core coil 6 for AC. If electric current having suitable frequency and intensity is supplied to the coil 6, inner surface of the pipe 7 is licked up the line 8 existing therein, and ion plated uniformly. |
