| 摘要 |
PURPOSE:To equalize the distribution of the dose of an electron beam from an electron-beam irradiation device by controlling the temperature distribution among several parallel linear cathodes when leading out the electron beam from the linear cathodes through a lead-out grid. CONSTITUTION:The electron beam irradiation device of this invention has a low-potential vacuum case 4, a negative high potential cylindrical shield 2 placed in the vacuum case 4 and several linear cathodes 1 installed inside the shield 2. An electron beam from the linear cathodes 1 is led out through a lead-out grid 3. The temperature distribution among the linear cathodes 1 is controlled either by making the diameters of the linear cathodes 1 different or by locating them at different pitches. Besides, the degree of the opening of the grid 3 is partially controlled. Due to the above structure, the high distribution of the electron beam is reduced and the low distribution of the electron beam is increased, thereby equalizing the distribution of the dose of the electron beam. |
